▎ 摘　　要

Hydrogen sensor based on graphene nano-composite with Pd-Ag nanoparticles was fabricated by MEMS process. Structural and morphological properties of the sensing film were studied by an energy dispersive spectroscopy (EDS) and field emission scanning electron microscopy (FESEM), respectively. The H-2 sensing properties of as-formed sensor were investigated by measuring the resistance changes at different H-2 concentrations. The maximum gas response was 16.2% at 1000 ppm of H-2 gas. The gas sensitivity of the as formed H-2 sensor showed linear behavior with the hydrogen concentration. Experimental results showed that the coupling of graphene with Pd/Ag alloy enhanced significantly hydrogen sensing performance. (C) 2018 Hydrogen Energy Publications LLC. Published by Elsevier Ltd. All rights reserved.