• 文献标题:   In Situ Fabrication and Characterization of Graphene Electronic Device Based on Dual Beam System
  • 文献类型:   Article
  • 作  者:   CHEN W, QIN SQ, ZHANG XA, FANG JY, WANG G, ZHANG S, WANG CC, WANG L, CHANG SL
  • 作者关键词:   in situ, graphene electronic device, dual beam system, ebeam inducing deposition
  • 出版物名称:   JOURNAL OF NANOSCIENCE NANOTECHNOLOGY
  • ISSN:   1533-4880 EI 1533-4899
  • 通讯作者地址:   Natl Univ Def Technol
  • 被引频次:   2
  • DOI:   10.1166/jnn.2015.9782
  • 出版年:   2015

▎ 摘  要

The graphene, as a one atomic-layer material, is very sensitive to the environment and easy to be polluted. Here, we propose an in situ fabrication and characterization method for graphene electronic devices using the Dual Beam system. Instead of the conventional photo/e-beam lithography, plasma etching and lift-off techniques, the focused ion beam (FIB) is employed to pattern the graphene and the e-beam induced deposition of platinum (Pt) is adopted to fabricate the electrodes. Using the nano-probes in the specimen chamber, we obtained the typical electronic bipolar behavior of graphene in situ both with the Pt/graphene contact and the nano-probes/graphene direct contact. In the whole process of the fabrication and characterization, the graphene sample is kept in high vacuum condition all the time.