▎ 摘　　要

This paper demonstrates an optical-thermally actuated multi-layer graphene resonator for humidity sensing. A similar to 10-layered graphene resonator with a diameter of 125 mu m peripherally clamped on the fiber ferrule end face was actuated to vibrate using the intensity-modulated laser, and the vibration was detected based on the optical fiber Fabry-Perot interference method. The humidity sensing experiment exhibited an up to 350 Hz/%RH humidity sensitivity in the range of 0-100 % RH at 25 degrees C, which was 10 times higher than those of the previously reported Quartz Crystal Microbalance (QCM)-based humidity sensors. Also, a good repeatability of the frequency-humidity response was observed for the presented graphene resonator. Moreover, in view of the coupling effect of temperature on the graphene resonator, the temperature drift of 0.942 kHz/degrees C was measured in the range of 25-50 degrees C, thereby inducing an absolute humidity error of about 0.6 g/(m(3)center dot degrees C).