• 文献标题:   Growth of Graphene-Like Structures on an Oxidized SiC Surface
  • 文献类型:   Article, Proceedings Paper
  • 作  者:   LU WJ, MITCHEL WC, BOECKL JJ, CRENSHAW TR, COLLINS WE, CHANG RPH, FELDMAN LC
  • 作者关键词:   graphene growth, carbon nanotube, sic, surface structure
  • 出版物名称:   JOURNAL OF ELECTRONIC MATERIALS
  • ISSN:   0361-5235 EI 1543-186X
  • 通讯作者地址:   Fisk Univ
  • 被引频次:   6
  • DOI:   10.1007/s11664-009-0715-5
  • 出版年:   2009

▎ 摘  要

Graphene-like structures were formed on an oxidized SiC (0001) surface following thermal annealing in a vacuum at high temperatures. The SiO2/SiC structure was annealed at 1350A degrees C in 10(-5) Torr; the SiO2 layer was vaporized, and two layer graphene-like structures were formed on the SiC surface. This method of fabricating graphene did not require an ultra-high vacuum. In the absence of the oxide layer, a film of vertical carbon nanotubes (CNTs) was grown on the SiC surface in the same temperature range at 10(-5) Torr.