▎ 摘　　要

Graphene film formation by carbon deposition from gaseous phase on nickel substrates is investigated using scanning tunnel microscope (STM) unit embedded into reactor of the chemical vapor deposition (CVD) system. The microscope was designed to provide STM measurements at the same 1 mu m x 1 mu m region on the sample surface before and just after CVD synthesis without taking the sample out of the reactor. The peculiarities of graphene deposits formation on polycrystalline nickel substrates are revealed using developed CVD-STM system. The topology features are analyzed in combination with Raman spectroscopy data. One of particular features revealed in this study is nanobubbles formation and collapse on graphene film surface. We are discussing possible mechanisms of this phenomenon.