• 文献标题:   Transfer of graphene layers grown on SiC wafers to other substrates and their integration into field effect transistors
  • 文献类型:   Article
  • 作  者:   UNARUNOTAI S, MURATA Y, CHIALVO CE, KIM HS, MACLAREN S, MASON N, PETROV I, ROGERS JA
  • 作者关键词:   chromium, contact resistance, epitaxial layer, gold, graphene, insulated gate field effect transistor, multilayer, polymer, raman spectra, rapid thermal annealing
  • 出版物名称:   APPLIED PHYSICS LETTERS
  • ISSN:   0003-6951
  • 通讯作者地址:   Univ Illinois
  • 被引频次:   55
  • DOI:   10.1063/1.3263942
  • 出版年:   2009

▎ 摘  要

This letter presents a simple method for transferring epitaxial sheets of graphene on silicon carbide to other substrates. The graphene was grown on the (0001) face of 6H-SiC by thermal annealing at 1550 degrees C in a hydrogen atmosphere. Transfer was accomplished using a peeling process with a bilayer film of gold/polyimide, to yield graphene with square millimeters of coverage on the target substrate. Raman spectroscopy provided evidence that the transferred material is single layer. Back gated field-effect transistors fabricated on oxidized silicon substrates with Cr/Au as source-drain electrodes exhibited ambipolar characteristics with hole mobilities of similar to 100 cm(2)/V-s, and negligible influence of resistance at the contacts.