▎ 摘　　要

This paper reports the fabrication of InN layers on the epitaxial graphene (EG) using radio-frequency plasma-assisted molecular beam epitaxy (RF-MBE). Prior to the fabrication of InN, single crystalline EG with step and terrace structure was formed on 6H-SiC (0001) substrate in an Ar ambient by the Si sublimation method. Single crystalline epitaxial layers of InN with smooth surfaces are successfully fabricated on the EG using RF-MBE. InN layers with terrace and step structure are grown on the graphene surface up to 2MLs, and InN are grown in a layer by layer 2D growth mode. If the number of layers is increased above 3 MLs, the terrace and steps disappear, and the growth mode changes to 3D mode. The Raman spectroscopy analysis shows that the interfacial stress is reduced for the InN layer grown on the EG surface. The quality of the grown InN layer on the EG surface achieved at present is comparable to the InN film grown on sapphire. This work opens the possibility of growing high-quality InN layers on the EG surface in the near future.