▎ 摘　　要

The reduction dynamics of micron-sized defects created on chemical vapor deposition-(CVD) grown graphene through scanning probe lithography (SPL) is reported here. CVD-grown graphene was locally oxidized using SPL and subsequently reduced, making use of a focused beam of soft x-rays. During this whole process, the reduction dynamics was monitored using a combination of micro-Raman spectroscopy (mu-RS) and micro-x-ray photoelectron spectroscopy (mu-XPS). After x-ray reduction, the graphene film was found to be chemically identical (mu-XPS) but structurally different (mu-RS) from the original graphene. During reduction the population of C-C bonds was found to first increase dramatically and then decrease exponentially. By modeling the dynamics of the C=O -> C-O -> C-C -> C=C reduction process with four coupled-rate equations and three rate constants, the conversion from C-Cto C=C bonds was found to be the limiting rate.