• 文献标题:   A simple process for the fabrication of large-area CVD graphene based devices via selective in situ functionalization and patterning
  • 文献类型:   Article
  • 作  者:   ALEXEEV AM, BARNES MD, NAGAREDDY VK, CRACIUN MF, WRIGHT CD
  • 作者关键词:   graphene, functionalization, humidity sensor, graphene device
  • 出版物名称:   2D MATERIALS
  • ISSN:   2053-1583
  • 通讯作者地址:   Univ Exeter
  • 被引频次:   10
  • DOI:   10.1088/2053-1583/4/1/011010
  • 出版年:   2017

▎ 摘  要

We report a novel approach for the fabrication of micro-and nano-scale graphene devices via the in situ plasma functionalization and in situ lithographic patterning of large-area graphene directly on CVD catalytic metal (Cu) substrates. This enables us to create graphene-based devices in their entirety prior to any transfer processes, simplifying very significantly the device fabrication process and potentially opening up the route to the use of a wider range of target substrates. We demonstrate the capabilities of our technique via the fabrication of a flexible, transparent, graphene/graphene oxide humidity sensor that outperforms a conventional commercial sensor.