• 文献标题:   Direct Fabrication of Ultra-Sensitive Humidity Sensor Based on Hair-Like Laser-Induced Graphene Patterns
  • 文献类型:   Article
  • 作  者:   LEE JU, MA YW, JEONG SY, SHIN BS
  • 作者关键词:   3d porous structures of graphene 3d pgs, laser induced graphene lig, laser direct writing ldw, hairlike, humidity sensor, polyimide pi
  • 出版物名称:   MICROMACHINES
  • ISSN:  
  • 通讯作者地址:   Pusan Natl Univ
  • 被引频次:   1
  • DOI:   10.3390/mi11050476
  • 出版年:   2020

▎ 摘  要

Three-dimensional (3-D) porous graphitic structures have great potential for sensing applications due to their conductive carbon networks and large surface area. In this work, we present a method for facile fabrication of hair-like laser induced graphene (LIG) patterns using a laser scribing system equipped with a 355 nm pulsed laser. The polyimide (PI) film was positioned on a defocused plane and irradiated at a slow scanning speed using a misaligned laser beam. These patterns have the advantages of a large surface area and abundant oxidation groups. We have applied the hair-like LIG patterns to a humidity sensor. The humidity sensor showed good sensitivity characteristics and a large amount of electronic carriers can be stored.