▎ 摘　　要

ABSRTACT We have previously found that pyrolysis of ethanol vapor on charge pre-patterned SiO2/Si substrate leads to controllable deposition of graphene-like films (GLFs). In this work we aim at the GLFs synthesis from acetone and isopropanol on SiO2/Si exposed to an electron beam with various energies and doses. Electron beam induced charge in 200 nm SiO2 is determined by the shift of the capacitance-voltage characteristics. Synthesized GLFs are characterized using Raman spectroscopy and atomic force microscopy. It is shown that the thickness of GLF on SiO2/Si increase together with the preliminary exposure dose and inversely associated with electron energies.