• 文献标题:   Large Fermi energy modulation in graphene transistors with high-pressure O-2-annealed Y2O3 topgate insulators
  • 文献类型:   Article
  • 作  者:   KANAYAMA K, NAGASHIO K, NISHIMURA T, TORIUMI A
  • 作者关键词:  
  • 出版物名称:   APPLIED PHYSICS LETTERS
  • ISSN:   0003-6951 EI 1077-3118
  • 通讯作者地址:   Univ Tokyo
  • 被引频次:   13
  • DOI:   10.1063/1.4867202
  • 出版年:   2014

▎ 摘  要

We demonstrate a considerable suppression of the low-field leakage through a Y2O3 topgate insulator on graphene by applying high-pressure O-2 at 100 atm during post-deposition annealing (HP-PDA). Consequently, the quantum capacitance measurement for the monolayer graphene reveals the largest Fermi energy modulation (E-F = similar to 0.52 eV, i.e., the carrier density of similar to 2 x 10(13) cm(-2)) in the solid-state topgate insulators reported so far. HP-PDA is the robust method to improve the electrical quality of high-k insulators on graphene. (C) 2014 AIP Publishing LLC.