• 文献标题:   Bilayer Graphene System: Current-Induced Reliability Limit
  • 文献类型:   Article
  • 作  者:   YU TH, LEE EK, BRIGGS B, NAGABHIRAVA B, YU B
  • 作者关键词:   bilayer graphene blg, breakdown, maximum current density, reliability
  • 出版物名称:   IEEE ELECTRON DEVICE LETTERS
  • ISSN:   0741-3106 EI 1558-0563
  • 通讯作者地址:   SUNY Albany
  • 被引频次:   24
  • DOI:   10.1109/LED.2010.2058994
  • 出版年:   2010

▎ 摘  要

We investigate the key reliability limiting factors of bilayer graphene (BLG) under current stressing by examining the breakdown characteristics of BLG with chemical-mechanical planarization copper contacts. It is observed that dc current-induced thermal annealing helps to reduce the BLG-to-Cu contact resistance. Breakdown occurs with two noticeably different failure modes depending on local stressing current level, while copper contact damage dominates in scaled structure. The measured linear dependence of breakdown current on graphene width/length aspect ratio suggests Joule heating as the primary breakdown mechanism.