▎ 摘　　要

The process of graphene cleaning of a copper film by bombarding it with Ar-13 clusters is investigated by the molecular dynamics method. The kinetic energies of the clusters are 5, 10, 20, and 30 eV and the incident angles are theta = 90 degrees, 75 degrees, 60 degrees, 45 degrees, and 0 degrees. It is obtained that the cluster energy should be in the interval 20 eV-30 eV for effective graphene cleaning. There is no cleaning effect at vertical incidence (q = 0 degrees) of Ar13 clusters. The bombardments at 45 degrees and 90 degrees incident angles are the most effective on a moderate and large amount of deposited copper, respectively.