• 文献标题:   Rapid CVD growth of millimetre-sized single crystal graphene using a cold-wall reactor
  • 文献类型:   Article
  • 作  者:   MISEIKIS V, CONVERTINO D, MISHRA N, GEMMI M, MASHOFF T, HEUN S, HAGHIGHIAN N, BISIO F, CANEPA M, PIAZZA V, COLETTI C
  • 作者关键词:   graphene, chemical vapour deposition, single crystal
  • 出版物名称:   2D MATERIALS
  • ISSN:   2053-1583
  • 通讯作者地址:   Ist Italiano Tecnol
  • 被引频次:   74
  • DOI:   10.1088/2053-1583/2/1/014006
  • 出版年:   2015

▎ 摘  要

In this work we present a simple pathway to obtain large single-crystal graphene on copper (Cu) foils with high growth rates using a commercially available cold-wall chemical vapour deposition (CVD) reactor. We show that graphene nucleation density is drastically reduced and crystal growth is accelerated when: (i) using ex situ oxidized foils; (ii) performing annealing in an inert atmosphere prior to growth; (iii) enclosing the foils to lower the precursor impingement flux during growth. Growth rates as high as 14.7 and 17.5 mu m min(-1) are obtained on flat and folded foils, respectively. Thus, single-crystal grains with lateral size of about 1 mm can be obtained in just 1 h. The samples are characterized by optical microscopy, scanning electron microscopy, x-ray photoelectron spectroscopy, Raman spectroscopy as well as selected area electron diffraction and low-energy electron diffraction, which confirm the high quality and homogeneity of the films. The development of a process for the quick production of large grain graphene in a commonly used commercial CVD reactor is a significant step towards an increased accessibility to millimetre-sized graphene crystals.