▎ 摘　　要

We present a simple and efficient method to immobilize graphene on silicon wafers using perfluorophenylazide (PFPA) as the coupling agent. Graphene sheets were covalently attached to PFPA-functionalized wafer surface by a simple heat treatment under ambient conditions. The formation of single and multiple layers of graphene were confirmed by Raman spectroscopy and optical and atomic force microscopy. Evidence of covalent bond formation between graphene and PFPA decorated silicon wafer was given by X-ray photoelectron spectroscopy and sonication treatment.