• 文献标题:   Performance evaluation of graphene oxide nanosheet water coolants in the grinding of semiconductor substrates
  • 文献类型:   Article
  • 作  者:   LI XL, HUANG SQ, WU YQ, HUANG H
  • 作者关键词:   graphene oxide, coolant, lubricant, grinding, silicon, gallium arsenide
  • 出版物名称:   PRECISION ENGINEERINGJOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING NANOTECHNOLOGY
  • ISSN:   0141-6359 EI 1873-2372
  • 通讯作者地址:   Univ Queensland
  • 被引频次:   0
  • DOI:   10.1016/j.precisioneng.2019.08.016
  • 出版年:   2019

▎ 摘  要

The use of coolants is normally required in the grinding of most of the engineering materials as it can significantly affect the ground surface quality and machining efficiency. Presently, in manufacturing industries, water or water emulsion is often used, but water has low viscosity and lubricity, which cannot provide sufficient lubrication, and the use and discharge of waste emulsion coolants is of environmental concern. In this study, water based coolants containing graphene oxide (GO) were developed to replace water or water emulsion, which is environmentally friendly. The lubrication characteristics of the GO coolants was investigated, and their grinding performance was systematically evaluated in terms of grinding force, force ratio and ground surface/subsurface damage. The experimental results showed that the GO coolants would significantly improve the lubrication with a much lower friction coefficient compared with water and emulsion coolants. The use of a 0.1 wt% GO coolant substantially reduced the tangential grinding force, and improved the surface quality in the grinding of Si and GaAs substrates. The improved grinding performance was attributed to the formation of a dynamic lubricating film of GO at the wheel-substrate interface.