• 文献标题:   Benzocyclobutene (BCB) Polymer as Amphibious Buffer Layer for Graphene Field-Effect Transistor
  • 文献类型:   Article
  • 作  者:   WU Y, ZOU JJ, HUO S, LU HY, KONG YC, CHEN TS, WU W, XU JX
  • 作者关键词:   hydrophobic, fieldeffect transistor, buffer layer, scattering, wettransfer method
  • 出版物名称:   JOURNAL OF NANOSCIENCE NANOTECHNOLOGY
  • ISSN:   1533-4880 EI 1533-4899
  • 通讯作者地址:   Nanjing Elect Device Inst
  • 被引频次:   0
  • DOI:   10.1166/jnn.2015.10034
  • 出版年:   2015

▎ 摘  要

Owing to the scattering and trapping effects, the interfaces of dielectric/graphene or substrate/graphene can tailor the performance of field-effect transistor (FET). In this letter, the polymer of benzocyclobutene (BCB) was used as an amphibious buffer layer and located at between the layers of substrate and graphene and between the layers of dielectric and graphene. Interestingly, with the help of nonpolar and hydrophobic BOB buffer layer, the large-scale top-gated, chemical vapor deposited (CVD) graphene transistors was prepared on Si/SiO2 substrate, its cutoff frequency (f(T)) and the maximum cutoff frequency (f(max)) of the graphene field-effect transistor (GFET) can be reached at 12 GHz and 11 GHz, respectively.