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  • 文献标题:   Sensitivity improvement of graphene/Al2O3/PVDF-TrFE stacked touch device through Al seed assisted dielectric scaling
  • 文献类型:   Article, Proceedings Paper
  • 作　　者:   YANG JH, HWANG HJ, KANG SC, LEE BH
  • 作者关键词:   dielectric scaling, al seed layer, piezoelectric effect, pvdftrfe, touch sensor, sensitivity
  • 出版物名称:   MICROELECTRONIC ENGINEERING
  • ISSN:   0167-9317 EI 1873-5568
  • 通讯作者地址:   Gwangju Inst Sci Technol
  • 被引频次:   6
  • DOI:   10.1016/j.mee.2015.04.039
  • 出版年:   2015

▎ 摘　　要

The sensitivity of touch sensor using piezoelectric polymer/graphene stack has been drastically improved by scaling the thickness of dielectric on the graphene. The piezoelectric effect induced charges in graphene channel were increased from 0.6195 to 4314 mu C/cm(2) at 1 kg press weight, which by enhancing the charge coupling between the PVDF-TrFE and graphene channel through the Al2O3 scaling from 30 nm to 5 nm. (C) 2015 Elsevier B.V. All rights reserved.