• 文献标题:   Chemical Vapor Deposition-Derived Graphene with Electrical Performance of Exfoliated Graphene
  • 文献类型:   Article
  • 作  者:   PETRONE N, DEAN CR, MERIC I, VAN DER ZANDE AM, HUANG PY, WANG L, MULLER D, SHEPARD KL, HONE J
  • 作者关键词:   graphene, cvd, boron nitride, grain, mobility
  • 出版物名称:   NANO LETTERS
  • ISSN:   1530-6984 EI 1530-6992
  • 通讯作者地址:   Columbia Univ
  • 被引频次:   252
  • DOI:   10.1021/nl204481s
  • 出版年:   2012

▎ 摘  要

While chemical vapor deposition (CVD) promises a scalable method to produce large-area graphene, CVD-grown graphene has heretofore exhibited inferior electronic properties in comparison with exfoliated samples. Here we test the electrical transport properties of CVD-grown graphene in which two important sources of disorder, namely grain boundaries and processing-induced contamination, are substantially reduced. We grow CVD graphene with grain sizes up to 250 mu m to abate grain boundaries, and we transfer graphene utilizing a novel, dry-transfer method to minimize chemical contamination. We fabricate devices on both silicon dioxide and hexagonal boron nitride (h-BN) dielectrics to probe the effects of substrate-induced disorder. On both substrate types, the large-grain CVD graphene samples are comparable in quality to the best reported exfoliated samples, as determined by low-temperature electrical transport and magnetotransport measurements. Small-grain samples exhibit much greater variation in quality and inferior performance by multiple measures, even in samples exhibiting high field-effect mobility. These results confirm the possibility of achieving high-performance graphene devices based on a scalable synthesis process.