• 文献标题:   Graphene Nanoelectromechanical Systems
  • 文献类型:   Article
  • 作  者:   CHEN CY, HONE J
  • 作者关键词:   graphene, mechanical resonator, nanoelectromechanical systems nems
  • 出版物名称:   PROCEEDINGS OF THE IEEE
  • ISSN:   0018-9219 EI 1558-2256
  • 通讯作者地址:   Columbia Univ
  • 被引频次:   69
  • DOI:   10.1109/JPROC.2013.2253291
  • 出版年:   2013

▎ 摘  要

Graphene possesses a combination of properties that make it extremely well suited for use in nanoelectromechanical systems (NEMS). Its exceptional mechanical properties include high stiffness and low mass, which lead to high resonant frequencies; and ultrahigh strength, which allows for strain tuning of frequency over a wide range. Its optical properties and high electronic mobility enable robust optical and electrical transduction, while its chemical inertness enables atomically thin devices. This paper reviews the basic properties of graphene NEMS, and recent work toward exploring device properties, readout techniques, and applications.