▎ 摘　　要

An integrated device for graphene electro-optic (EO) modulation and wavelength-mode division hybrid multiplexing (WMDM) is proposed. The device is composed of three parts: EO modulator, wavelength division multiplexer (WDM), and mode division multiplexer (MDM). The EO modulator and WDM consist of a one-dimensional photonic crystal nanobeam cavity coupled with a nanowire waveguide. The modulation of a certain wavelength can be achieved by utilizing the characteristic that the chemical potential of graphene can be adjusted with voltage. The MDM adopts nanowire waveguides to realize mode conversion. The performance parameters of the integrated device are analyzed using the three-dimensional finite-difference time-domain method of numerical analysis. The results show that the integrated device can simultaneously complete the modulation and WMDM of the fundamental transverse electric (TE0) modes and first-order TE (TE1) modes at 1570.0 and 1573.2 nm, respectively. The extinction ratio is greater than 23.2 dB, the insertion loss is < 0.36 dB, and the channel crosstalk is < - 22.7 dB. In addition, the modulation speed reaches 18 GHz.(c) 2022 Society of Photo-Optical Instrumentation Engineers (SPIE)