• 文献标题:   Conductive Atomic Force Microscope Nanopatterning of Epitaxial Graphene on SiC(0001) in Ambient Conditions
  • 文献类型:   Article
  • 作  者:   ALABOSON JMP, WANG QH, KELLAR JA, PARK J, ELAM JW, PELLIN MJ, HERSAM MC
  • 作者关键词:  
  • 出版物名称:   ADVANCED MATERIALS
  • ISSN:   0935-9648
  • 通讯作者地址:   Northwestern Univ
  • 被引频次:   29
  • DOI:   10.1002/adma.201100367
  • 出版年:   2011

▎ 摘  要

Conductive atomic force microscope (cAFM) nanopatterning is demonstrated on epitaxial graphene on SiC (0001) under ambient conditions. Nanopatterning kinetics and chemistry suggest that ambient cAFM nanopatterning induces local oxidization with the surface, interface, and bulk layers of epitaxial graphene on SiC (0001) playing distinct roles in the depth profile of the final nanopatterned structure.