• 文献标题:   Passivating chemical vapor deposited graphene with metal oxides for transfer and transistor fabrication processes
  • 文献类型:   Article
  • 作  者:   YAMAGUCHI J, HAYASHI K, SATO S, YOKOYAMA N
  • 作者关键词:  
  • 出版物名称:   APPLIED PHYSICS LETTERS
  • ISSN:   0003-6951 EI 1077-3118
  • 通讯作者地址:   Natl Inst Adv Ind Sci Technol
  • 被引频次:   11
  • DOI:   10.1063/1.4801927
  • 出版年:   2013

▎ 摘  要

The dependence of the spectroscopic and electrical transport characteristics of graphene grown by chemical vapor deposition on oxide-passivations was investigated. We found that in graphene transfer and transistor fabrication processes, Al2O3- and Cr2O3-passivations are effective to suppress the extrinsic p-type doping into graphene due to surface contamination. TiO2- and NiO-passivations are not suitable because p-d hybridization between graphene pi (p(z)) and metal (Ti or Ni) d orbitals occurs at the interfaces, resulting in deteriorated transport properties. (C) 2013 AIP Publishing LLC