• 文献标题:   Influence of the copper substrate roughness on the electrical quality of graphene
  • 文献类型:   Article
  • 作  者:   KWON GD, MOYEN E, LEE YJ, KIM YW, BAIK SH, PRIBAT D
  • 作者关键词:   graphene synthesi, polished cu substrate, low surface roughnes, high carrier mobility value
  • 出版物名称:   MATERIALS RESEARCH EXPRESS
  • ISSN:   2053-1591
  • 通讯作者地址:   Sungkyunkwan Univ
  • 被引频次:   4
  • DOI:   10.1088/2053-1591/aa54d3
  • 出版年:   2017

▎ 摘  要

We present a systematic study of grain size and carrier mobility behaviour in polycrystalline graphene films grown on copper substrates with various surface roughness values. We first observe that as the surface roughness of the substrate decreases, the graphene grain size increases significantly, thus decreasing the density of grain boundaries. Then, using field-effect transistor structures, we confirm that as the substrate roughness decreases, carrier mobility values in graphene increase, whatever the channel length of the transistor. For a substrate rms roughness around 5 nm (measured on a 10 x 10 mu m(2) field) and using a fast growth process (similar to 40 min), we obtain mobility values as high as similar to 6900 cm(2) Vs(-1) for electrons and similar to 6000 cm(2) Vs(-1) for holes in polycrystalline graphene with a small grain size of similar to 12-14 mu m.