• 文献标题:   All CVD Boron Nitride Encapsulated Graphene FETs With CMOS Compatible Metal Edge Contacts
  • 文献类型:   Article
  • 作  者:   PANDEY H, SHAYGAN M, SAWALLICH S, KATARIA S, ZHENXING W, NOCULAK A, OTTO M, NAGEL M, NEGRA R, NEUMAIER D, LEMME MC
  • 作者关键词:   boron nitride bn, chemical vapor deposition cvd, edge contact, graphene, intrinsic voltage gain, mobility, radio frequency rf, terahertz thz, voltage amplifier
  • 出版物名称:   IEEE TRANSACTIONS ON ELECTRON DEVICES
  • ISSN:   0018-9383 EI 1557-9646
  • 通讯作者地址:   Rhein Westfal TH Aachen
  • 被引频次:   4
  • DOI:   10.1109/TED.2018.2865382
  • 出版年:   2018

▎ 摘  要

We report on the fabrication and characterization of field-effect transistors (FETs) based on chemical vapor deposited (CVD) graphene encapsulated between few layer CVD boron nitride (BN) sheets with complementary metal-oxide-semiconductor (CMOS) compatible nickel edge contacts. Noncontact terahertz time-domain spectroscopy (THz-TDS) of large-area BN/graphene/BN (BN/G/BN) stacks reveals average sheet conductivity >1 mS/sq. and average mobility of 2500 cm(2)/V . s. Improved output conductance is observed in dc measurements under ambient conditions, indicating the potential for radio frequency (RF) applications. Moreover, we report a maximum voltage gain of 6 dB from a low-frequency signal amplifier circuit. RF characterization of the GFETs yields an f(T) x L-g product of 2.64 GHz . mu m and an f(Max) x L-g product of 5.88 GHz . mu m. This paper presents for the first time THz-TDS usage in combination with other characterization methods for device performance assessment on BN/G/BN stacks. The results serve as a step toward scalable, all CVD 2-D material-based FETs for CMOS compatible future nanoelectronic circuit architectures.