▎ 摘　　要

We attached single-layer graphene or few-layer graphene (FLG) on a sapphire (1-102) surface with well-ordered step/terrace structures and then etched them using catalytic nanoparticles. In the etching of FLG flakes, atomic steps can be utilized as guides or reflectors. In the case of single-layer graphene, the etching proceeds in a particular direction of a surface phase pattern on the terrace, and graphene nanoribbons are self-formed. The surface structures of the supporting substrate are good templates for graphene processing.