• 文献标题:   Solution processed simple and scalable graphene patterning method for nanodevices application
  • 文献类型:   Article
  • 作  者:   YADAV S, KAUR I
  • 作者关键词:   graphene patterning, electron beam lithography, pattern fabrication, thin film, nanodevice, hall probe pattern
  • 出版物名称:   MATERIALS RESEARCH EXPRESS
  • ISSN:   2053-1591
  • 通讯作者地址:   CSIR CSIO
  • 被引频次:   0
  • DOI:   10.1088/2053-1591/3/12/125011
  • 出版年:   2016

▎ 摘  要

We have reported a simple, scalable and solution processed graphene patterning method using electron beam lithography followed by a lift-off process. This method is free from etching process and can be used for fabrication of graphene based patterns for nanodevices application. This process is universal to arbitrary substrates and can be employed for large scale pattern fabrication especially for graphene array based nanodevice applications. Using this method various types of graphene patterns like rectangular lines (100 mu m x 10 mu m) connecting with square pads (50 mu m x 50 mu m) and hall probe patterns were created over oxidized silicon substrates.