• 文献标题:   Epitaxial graphene on silicon carbide: Introduction to structured graphene
  • 文献类型:   Article
  • 作  者:   RUAN M, HU YK, GUO ZL, DONG R, PALMER J, HANKINSON J, BERGER C, DE HEER WA
  • 作者关键词:  
  • 出版物名称:   MRS BULLETIN
  • ISSN:   0883-7694 EI 1938-1425
  • 通讯作者地址:   Georgia Inst Technol
  • 被引频次:   35
  • DOI:   10.1557/mrs.2012.231
  • 出版年:   2012

▎ 摘  要

We present an introduction to the rapidly growing field of epitaxial graphene on silicon carbide, tracing its development from the original proof-of-concept experiments a decade ago to its present, highly evolved state. The potential of epitaxial graphene as a new electronic material is now being recognized. Whether the ultimate promise of graphene-based electronics will ever be realized remains an open question. Silicon electronics is based on single-crystal substrates that allow reliable patterning on the nanoscale, which is an absolute requirement for any new electronic material. That is why epitaxial graphene is based on single-crystal silicon carbide. We also present recent results on nanopatterned graphene produced by etching the silicon carbide before annealing so that the graphene structures are produced in their final shapes. This avoids postannealing patterning, which is known to greatly affect transport properties on the nanoscale. Creating such structured graphene is an elegant method for avoiding pervasive patterning problems.