• 文献标题:   Direct growth of large-area graphene films onto oxygen plasma-etched quartz for nitrogen dioxide gas detection
  • 文献类型:   Article
  • 作  者:   YANG H, HUANG L, CHANG QH, MA ZJ, XU SH, CHEN Q, SHI WZ
  • 作者关键词:   graphene film, chemical vapour deposition, sensors ga
  • 出版物名称:   JOURNAL OF PHYSICS DAPPLIED PHYSICS
  • ISSN:   0022-3727 EI 1361-6463
  • 通讯作者地址:   Shanghai Normal Univ
  • 被引频次:   7
  • DOI:   10.1088/0022-3727/47/31/315101
  • 出版年:   2014

▎ 摘  要

We report a simple oxygen plasma-etching of quartz substrates as an active surface for efficient growth of graphene films through a chemical vapour deposition process. The resulting graphene films prepared on the oxygen plasma-etched quartz surface exhibited a high optical transmittance of 95.3% coupled with a sheet resistance of similar to 4.6 k Omega sq(-1). We also demonstrated that the as-grown graphene films had a high sensitivity to NO2 at low parts-per-million level in air at room temperature. Our work suggested that the as-grown films on quartz can be used as chemoresistive sensors for transparent electronics applications.