• 文献标题:   Novel Fabrication of Flexible Graphene-Based Chemical Sensors with Heaters using Soft Lithographic Patterning Method
  • 文献类型:   Article
  • 作  者:   JUNG MW, MYUNG S, SONG W, KANG MA, KIM SH, YANG CS, LEE SS, LIM J, PARK CY, LEE JO, AN KS
  • 作者关键词:   graphene sensor, graphene heater, soft lithographic patterning
  • 出版物名称:   ACS APPLIED MATERIALS INTERFACES
  • ISSN:   1944-8244 EI 1944-8252
  • 通讯作者地址:   Korea Res Inst Chem Technol
  • 被引频次:   26
  • DOI:   10.1021/am502281t
  • 出版年:   2014

▎ 摘  要

We have fabricated graphene-based chemical sensors with flexible heaters for the highly sensitive detection of specific gases. We believe that increasing the temperature of the graphene surface significantly enhanced the electrical signal change of the graphene-based channel, and reduced the recovery time needed to obtain a normal state of equilibrium. In addition, a simple and efficient soft lithographic patterning process was developed via surface energy modification for advanced, graphene-based flexible devices, such as gas sensors. As a proof of concept, we demonstrated the high sensitivity of NO2 gas sensors based on graphene nanosheets. These devices were fabricated using a simple soft-lithographic patterning method, where flexible graphene heaters adjacent to the channel of sensing graphene were utilized to control graphene temperature.