▎ 摘　　要

We report about technology of fabrication and optimization of a gas sensor based on epitaxial graphene. Optimized graphene/metal contact configuration exhibited low contact resistance. Complementary annealing of graphene sensor after each gas exposure led to significant improvement in the sensing performance. The response of the annealed sensor to the nitrogen dioxide (NO2) was tenfold higher than that of an as-fabricated graphene sensor. NO2 concentration as low as 0.2 parts per billion (ppb) was easily detectable. Devices have high signal-to-noise ratio. The detection limit of the graphene sensor was estimated to be 0.6 ppt (parts per trillion). The present technology with additional annealing improves the performance of the graphene based sensor and makes it suitable for the environmental nitrogen dioxide gas monitoring.