• 文献标题:   Operando photoelectron spectroscopy analysis of graphene field-effect transistors
  • 文献类型:   Article
  • 作  者:   LU YY, YANG YL, CHUANG PY, JHOU J, HSU JH, HSIEH SH, CHEN CH
  • 作者关键词:   operando, xps, graphene transistor, amorphous si3n4, defect
  • 出版物名称:   NANOTECHNOLOGY
  • ISSN:   0957-4484 EI 1361-6528
  • 通讯作者地址:  
  • 被引频次:   0
  • DOI:   10.1088/1361-6528/ac87b6
  • 出版年:   2022

▎ 摘  要

In this study, operando photoelectron spectroscopy was used to characterize the performance of graphene field-effect transistors under working conditions. By sweeping the back-gate voltages, the carrier concentration of the graphene channel on the 150 nm Si3N4/Si substrate was tuned. From the C1s core level spectra acquired under the application of different gate voltages, the binding energy shifts caused by electric-field effects were obtained and analyzed. Together with the C1s peak shape information and the photoluminescence spectrum of the Si3N4/Si substrate, the presence of local potential across the x-ray beam spot associated with defects and gate leakage current in amorphous Si3N4 was identified. The presence of defects in Si3N4/Si substrate could not only screen the partial electric field generated by the back gate but also serve as long-range scattering centers to the carriers, thus affecting charge transport in the graphene channel. Our findings will help further investigate the dielectric/graphene interface properties and accelerate the utilization of graphene in real device applications.