• 文献标题:   Flexible graphene-based micro-capacitors using ultrafast laser ablation
  • 文献类型:   Article
  • 作  者:   WANG CP, CHOU CP, WANG PC, CHAN TL
  • 作者关键词:   graphene, picosecond laser, flexible, sensor, ultrafast laser ablation
  • 出版物名称:   MICROELECTRONIC ENGINEERING
  • ISSN:   0167-9317 EI 1873-5568
  • 通讯作者地址:   Natl Taipei Univ Technol
  • 被引频次:   1
  • DOI:   10.1016/j.mee.2019.111000
  • 出版年:   2019

▎ 摘  要

This study investigated the sensor performance and durability of flexible graphene-based micro-capacitor using ultrafast laser ablation with picosecond (PS) pulses. Micro-patterns were fabricated under varying electrode widths, lengths, and gaps on the flexible polyethylene terephthalate (PET) substrates for optimal capacitive performance. The experimental results showed that the untouched capacitance of the micro-capacitors had an approximately linear relationship with electrode widths and lengths. Increasing the electrode width can effectively enhance capacitance of the micro-capacitor, especially under small electrode gap. Micro-capacitors exhibited stable relative resistance change and excellent capacitance retention when bending angle 0