• 文献标题:   Chemical Vapor Deposition of Graphene on Copper Foils
  • 文献类型:   Article
  • 作  者:   RUSAKOV PS, KONDRASHOV II, RYBIN MG, POZHAROV AS, OBRAZTSOVA ED
  • 作者关键词:   graphene, cvd
  • 出版物名称:   JOURNAL OF NANOELECTRONICS OPTOELECTRONICS
  • ISSN:   1555-130X EI 1555-1318
  • 通讯作者地址:   AM Prokhorov Gen Phys Inst
  • 被引频次:   9
  • DOI:   10.1166/jno.2013.1443
  • 出版年:   2013

▎ 摘  要

The problem of graphene fabrication is still open. Nowadays one of the best methods of graphene synthesis is a chemical vapor deposition (CVD) on copper substrates. Here we present a study of a dependence of the quality and size of synthesized graphene monolayer on the synthesis process parameters. The time of synthesis was found to be one of the key parameters influenced to the number of defects, which was estimated on the base of D peak (1350 cm(-1)) height in Raman spectra. Another important parameters are the substrate maximum temperature and the period of maintaining the sample under this temperature.