• 文献标题:   Fabrication and Evaluation of a Graphene Oxide-Based Capacitive Humidity Sensor dagger
  • 文献类型:   Article
  • 作  者:   FENG JF, KANG XX, ZUO QY, YUAN C, WANG WJ, ZHAO YH, ZHU LM, LU HW, CHEN JY
  • 作者关键词:   graphene oxide, relative humidity, capacitive sensing, humidity sensor
  • 出版物名称:   SENSORS
  • ISSN:   1424-8220
  • 通讯作者地址:   Shanghai IC R D Ctr
  • 被引频次:   12
  • DOI:   10.3390/s16030314
  • 出版年:   2016

▎ 摘  要

In this study, a CMOS compatible capacitive humidity sensor structure was designed and fabricated on a 200 mm CMOS BEOL Line. A top Al interconnect layer was used as an electrode with a comb/serpent structure, and graphene oxide (GO) was used as sensing material. XRD analysis was done which shows that GO sensing material has a strong and sharp (002) peak at about 10.278 degrees, whereas graphite has (002) peak at about 26 degrees. Device level CV and IV curves were measured in mini-environments at different relative humidity (RH) level, and saturated salt solutions were used to build these mini-environments. To evaluate the potential value of GO material in humidity sensor applications, a prototype humidity sensor was designed and fabricated by integrating the sensor with a dedicated readout ASIC and display/calibration module. Measurements in different mini-environments show that the GO-based humidity sensor has higher sensitivity, faster recovery time and good linearity performance. Compared with a standard humidity sensor, the measured RH data of our prototype humidity sensor can match well that of the standard product.