▎ 摘　　要

The Raman and photoluminescence spectra of short-period C/SiC superlattices produced by RF magnetron sputtering are investigated. The Raman data indicate that, in 35-period Sitall/Ni/[C/SiC] superlattices with the C and SiC effective thicknesses of 3.5 and 3 , respectively, subjected to postgrowth avalanche annealing, the carbon layers assume the structure of multilayer graphene with 3-5 graphene sheets per superlattice period. A method for the fabrication of graphene-like carbon structures on the basis of short-period superlattices grown by RF sputtering is suggested and implemented.