• 文献标题:   Quasi-freestanding epitaxial graphene transistor with silicon nitride top gate
  • 文献类型:   Article
  • 作  者:   WEHRFRITZ P, FROMM F, MALZER S, SEYLLER T
  • 作者关键词:   epitaxial graphene, doping, silicon nitride, field effect
  • 出版物名称:   JOURNAL OF PHYSICS DAPPLIED PHYSICS
  • ISSN:   0022-3727 EI 1361-6463
  • 通讯作者地址:   Tech Univ Chemnitz
  • 被引频次:   4
  • DOI:   10.1088/0022-3727/47/30/305103
  • 出版年:   2014

▎ 摘  要

We report on top-gated field effect devices built from quasi-freestanding monolayer graphene (QFMLG) on 6H-SiC(0001) in combination with a silicon nitride (SiN) gate dielectric. SiN was grown by plasma enhanced chemical vapour deposition. The composition of the dielectric was investigated by x-ray photoelectron spectroscopy (XPS). Spectroscopic and electrical characterization of the graphene layers were done by XPS, Raman spectroscopy and Hall effect measurements before and after SiN deposition. In contrast to previous reports on SiN/graphene, we observe that our dielectric layer induces strong n-type doping. With such a gate insulator, the neutrality level of the QFMLG could be accessed by an appropriate gate voltage.