▎ 摘　　要

A dry photoprocess for converting graphene oxide (GO) to reduced GO (rGO) by vacuum-ultraviolet (VUV) irradiation is reported. The rapid reduction of GO was achieved by irradiating a GO sheet in vacuum with 172 nm VUV light at a low power density of 10 mW.cm(-2). This VUV reduction photochemistry was successfully applied to photolithography by which rGO lines could be drawn on a GO microsheet at a submicrometer resolution. This method will be promising for the fabrication of graphene-based microdevices. (C) 2014 The Japan Society of Applied Physics