▎ 摘　　要

In this study, ZnO nanorods (NRs) were grown using solgel/hydrothermal methods on SiO2, carbon nanotube (CNT)/SiO2, and graphene/SiO2 substrates to form hydrogen gas sensing chips. Results indicate that ZnO NRs/CNT/SiO2 structures exhibited better H-2 sensing performance than the other two types of ZnO NRs-based structures. Furthermore, multiple electrical and material characterizations show that ZnO NRs/CNT/SiO2 structures had a stronger (002) crystalline phase, with nanorod fusion near the bottom, and more oxygen-related defects. Owing to their small size, simple fabrication, and low cost, the ZnO NRs/CNT/SiO2 based H-2 gas sensors are promising for future industrial H-2 sensing applications.