• 文献标题:   Inductively heated synthesized graphene with record transistor mobility on oxidized silicon substrates at room temperature
  • 文献类型:   Article
  • 作  者:   TAO L, LEE J, LI HF, PINER RD, RUOFF RS, AKINWANDE D
  • 作者关键词:  
  • 出版物名称:   APPLIED PHYSICS LETTERS
  • ISSN:   0003-6951 EI 1077-3118
  • 通讯作者地址:   Univ Texas Austin
  • 被引频次:   19
  • DOI:   10.1063/1.4828501
  • 出版年:   2013

▎ 摘  要

We report chemical vapor-deposited (CVD) graphene field-effect transistors (GFETs) on conventional SiO2/Si substrate with high-performance comparable to GFETs on boron nitride under practical ambient conditions. The fabricated GFET statistics reveal maximum carrier mobility of similar to 17800 cm(2)/V-s. Intrinsic graphene features such as three-region output characteristics including soft current saturation have also been observed, in addition to over ten-fold gate modulation. Low-temperature studies indicate that impurity scattering is the limiting transport mechanism. Our results on graphene, synthesized by an inductively heated CVD system, suggest that the prospects of GFETs on oxidized silicon are comparable to those on ideal surfaces, e.g., hBN at room temperature. (C) 2013 AIP Publishing LLC.