• 文献标题:   Toward the Synthesis of Wafer-Scale Single-Crystal Graphene on Copper Foils
  • 文献类型:   Article
  • 作  者:   YAN Z, LIN J, PENG ZW, SUN ZZ, ZHU Y, LI L, XIANG CS, SAMUEL EL, KITTRELL C, TOUR JM
  • 作者关键词:   graphene, hexagonal, singlecrystal, cpcvd
  • 出版物名称:   ACS NANO
  • ISSN:   1936-0851 EI 1936-086X
  • 通讯作者地址:   Rice Univ
  • 被引频次:   388
  • DOI:   10.1021/nn303352k
  • 出版年:   2012

▎ 摘  要

In this research, we constructed a controlled chamber pressure CVD (CP-CVD) system to manipulate graphene's domain sizes and shapes. Using this system, we synthesized large (similar to 4.5 mm(2)) single-crystal hexagonal monolayer graphene domains on commercial polycrystalline Cu foils (99.8% purity), indicating its potential feasibility on a large scale at low cost. The as-synthesized graphene had a mobility of positive charge carriers of similar to 11000 cm(2) V-1 s(-1) on a SiO2/Si substrate at room temperature, suggesting its comparable quality to that of exfoliated graphene. The growth mechanism of Cu-based graphene was explored by studying the influence of varied growth parameters on graphene domain sizes. Cu pretreatments, electrochemical polishing, and high-pressure annealing are shown to be critical for suppressing graphene nucleation site density. A pressure of 108 Torr was the optimal chamber pressure for the synthesis of large single-crystal monolayer graphene. The synthesis of one graphene seed was achieved on centimeter-sized Cu foils by optimizing the flow rate ratio of H-2/CH4. This work should provide clear guidelines for the large-scale synthesis of wafer-scale single-crystal graphene, which is essential for the optimized graphene device fabrication.