▎ 摘　　要

The quality of metal-graphene contact has a great influence on the performance of graphene-based electronic devices. In this paper, a simple, fast and accurate method is introduced to evaluate the quality of metal-graphene contact, which is based on measuring the contact end resistance. Using this method, the effect of rapid thermal annealing on the metal-graphene contact is investigated. It is common observation that before the rapid thermal annealing, contact end resistance has a large variation showing that the metal-graphene contact is in a relatively unstable state when the device is just prepared. After the rapid thermal annealing treatment, contact end resistances show a good consistency for all the devices. The results of contact end resistance are consistent with the images of scanning electron microscope observed before and after the rapid thermal annealing, which indicates that using the contact end resistance to evaluate the quality of metal-graphene contact is an efficient and effective way to predict the contact quality.