• 文献标题:   Millimeter-sized few-layer suspended graphene membranes
  • 文献类型:   Article
  • 作  者:   CARVALHO AF, FERNANDES AJS, BEN HASSINE M, FERREIRA P, FORTUNATO E, COSTA FM
  • 作者关键词:   cvd graphene, transfer, sublimation, anthracene, microphone
  • 出版物名称:   APPLIED MATERIALS TODAY
  • ISSN:   2352-9407
  • 通讯作者地址:   Univ Aveiro
  • 被引频次:   0
  • DOI:   10.1016/j.apmt.2020.100879
  • 出版年:   2020

▎ 摘  要

In this work, suspended 4-mm-wide graphene membranes are obtained through a sublimation-assisted transfer process, using few-layer films grown by microwave plasma chemical vapor deposition. This result is achieved by a new approach involving the removal of the graphene-transfer supporting layer in vacuum. The membranes produced by this procedure show the largest area-to-thickness ratio described in the literature with a 2-fold improvement when compared to the best results using the conventional PMMA-assisted transfer, and a five orders of magnitude increase when compared to previous sublimation assisted processes. This breakthrough allows the implementation of a wide variety of technological applications where 2D materials with atomic thickness and large areas are required. As large-area freestanding membranes are difficult to obtain, a new figure of merit is defined to benchmark the various methods of suspending graphene. A high transfer yield is achieved, and the mechanical and optical properties of the 3.7 nm thick membranes are evaluated. Finally, a prototype condenser microphone is built and tested, and found to exhibit an enhanced specific response. (C) 2020 Elsevier Ltd. All rights reserved.