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  • 文献标题:   Case studies of electrical characterisation of graphene by terahertz time-domain spectroscopy
  • 文献类型:   Review
  • 作　　者:   WHELAN PR, ZHOU BB, BEZENCENET O, SHIVAYOGIMATH A, MISHRA N, SHEN Q, JESSEN BS, PASTERNAK I, MACKENZIE DMA, JI J, SUN CZ, SENEOR P, DLUBAK B, LUO BR, OSTERBERG FW, HUANG DP, SHI HF, LUO D, WANG MH, RUOFF RS, CONRAN B, MCALEESE C, HUYGHEBAERT C, BREMS S, BOOTH TJ, NAPAL I, STRUPINSKI W, PETERSEN DH, FORTI S, COLETTI C, JOUVRAY A, TEO KBK, CENTENO A, ZURUTUZA A, LEGAGNEUX P, JEPSEN PU, BOGGILD P
  • 作者关键词:   terahertz spectroscopy, largescale graphene, cvd graphene, electrical mapping
  • 出版物名称:   2D MATERIALS
  • ISSN:   2053-1583
  • 通讯作者地址:  
  • 被引频次:   14
  • DOI:   10.1088/2053-1583/abdbcb
  • 出版年:   2021

▎ 摘　　要

Graphene metrology needs to keep up with the fast pace of developments in graphene growth and transfer. Terahertz time-domain spectroscopy (THz-TDS) is a non-contact, fast, and non-destructive characterization technique for mapping the electrical properties of graphene. Here we show several case studies of graphene characterization on a range of different substrates that highlight the versatility of THz-TDS measurements and its relevance for process optimization in graphene production scenarios.