▎ 摘　　要

Planar on-chip micro-supercapacitors (POMSs) with interdigital configuration were produced by photolithography and self-assembly of liquid-air interface. It is notable that the electrochemical performance of the POMS was significantly enhanced by reducing the electrode width from 300 mu m to 180 mu m, which highlight the importance of adjusting the width of electrode when creating high-performance POMS. It produced an area capacitance of 0.26 mu F cm(-2). In addition, POMS provide a power density of 0.825W cm(-3), much higher than the power density of the electrolytic capacitor, and capacitor retention rate after 2000 cycles stabilized at 82.5%.