▎ 摘 要
Texture could improve the tribological properties of thin films effectively. The mechanism of surface texture improving tribological performance has been extensively studied. However, the coupling effect of surface texture and interface texture on tribological performances needs to be comprehensively understood. In this work, we fabricated surface/interface textured carbon films. The experimental results proved that the tribological properties of carbon films had a remarkable enhancement after adding surface/interface texture and they were strongly related to the texture parameters. The mechanism of the enhanced performance was discussed based on the promotion of transfer films and the enhancement of film-substrate adhesion strength induced by the surface/ interface texture. Finally, a coupling effect of surface/interface texture on the tribological performance was proposed.