• 文献标题:   Direct Growth of Graphene on Silicon by Metal-Free Chemical Vapor Deposition
  • 文献类型:   Article
  • 作  者:   TAI LX, ZHU DM, LIU X, YANG TY, WANG L, WANG R, JIANG S, CHEN ZH, XU ZM, LI XL
  • 作者关键词:   graphene, silicon, metalfree cvd, domain growth
  • 出版物名称:   NANOMICRO LETTERS
  • ISSN:   2311-6706 EI 2150-5551
  • 通讯作者地址:   Chinese Acad Sci
  • 被引频次:   12
  • DOI:   10.1007/s40820-017-0173-1
  • 出版年:   2018

▎ 摘  要

The metal-free synthesis of graphene on single-crystal silicon substrates, the most common commercial semiconductor, is of paramount significance for many technological applications. In this work, we report the growth of graphene directly on an upside-down placed, single-crystal silicon substrate using metal-free, ambient-pressure chemical vapor deposition. By controlling the growth temperature, in-plane propagation, edge-propagation, and core-propagation, the process of graphene growth on silicon can be identified. This process produces atomically flat monolayer or bilayer graphene domains, concave bilayer graphene domains, and bulging few-layer graphene domains. This work would be a significant step toward the synthesis of large-area and layer-controlled, high-quality graphene on single-crystal silicon substrates. [GRAPHICS]