▎ 摘 要
We have successfully fabricated a pH-sensor array based on chemical-vapor-deposition (CVD)-synthesized graphene. As large-scale monolayer graphene is synthesized by this method, the size and the position of graphene can be controlled. Therefore, after transferring graphene onto SiO2/Si substrates, a graphene field-effect transistor (FET) array was produced. The sensing characteristics of the CVD-synthesized graphene-based device were investigated using three buffer solutions with different pH values (pHs 4.0, 6.8, and 9.3). The electrical measurements reveal that for most of the graphene FETs in the array, a similar stepwise increment in drain current was observed upon the introduction of each buffer solution with increasing pH value sequence. This will lead to the realization of the fabrication of multiplex hand-held chemical and biological sensors based on CVD-synthesized graphene. (C) 2013 The Japan Society of Applied Physics