• 文献标题:   Simplistic graphene transfer process and its impact on contact resistance
  • 文献类型:   Article
  • 作  者:   GHONEIM MT, SMITH CE, HUSSAIN MM
  • 作者关键词:  
  • 出版物名称:   APPLIED PHYSICS LETTERS
  • ISSN:   0003-6951 EI 1077-3118
  • 通讯作者地址:   King Abdullah Univ Sci Technol
  • 被引频次:   19
  • DOI:   10.1063/1.4804642
  • 出版年:   2013

▎ 摘  要

Chemical vapor deposition based graphene grown on copper foil is attractive for electronic applications owing to its reliable growth process, large area coverage, and relatively defect free nature. However, transfer of the synthesized graphene to host substrate for subsequent device fabrication is extremely sensitive and can impact ultimate performance. Although ultra-high mobility is graphene's most prominent feature, problems with high contact resistance have severely limited its true potential. Therefore, we report a simple poly-(methyl methacrylate) based transfer process without post-annealing to achieve specific contact resistivity of 3.8 x 10(-5) Omega cm(2) which shows 80% reduction compared to previously reported values. (c) 2013 AIP Publishing LLC.